Sputter Deposited Multilayer V-UV Mirrors

Felix E. Fernandez; Charles M. Falco

doi:10.1117/12.949668

6 May 1985 Sputter Deposited Multilayer V-UV Mirrors

Felix E. Fernandez, Charles M. Falco

Author Affiliations +

Proceedings Volume 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics; (1985) https://doi.org/10.1117/12.949668
Event: 29th Annual Technical Symposium, 1985, San Diego, United States

Abstract

The design and fgbrication of aluminum/niobium multilayers to be used as normal-incidence reflectors for 300 A radiation are presented. Preliminary characterization results are discussed showing the effects of interfacial roughness and diffusion.

Citation Download Citation

Felix E. Fernandez and Charles M. Falco "Sputter Deposited Multilayer V-UV Mirrors", Proc. SPIE 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics, (6 May 1985); https://doi.org/10.1117/12.949668

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