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6 May 1985 Thermal Stability of W/C Multilayer Films
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Abstract
W(10A)/C(40A), W(15A)/C(15A) and W(40A)/C(10A) periodic multilayer films were prepared by magnetron sputtering and subsequently annealed at 730°C. The resulting change of the layered and crystal structures was studied by X-ray diffraction. The resulting structures largely depended on the thickness ratio of W to C. For example, in the W(15Å)/C(15Å) sample a-W as formed without any peaks of carbon crystals; in W(40Å) C(10Å)only W2C (orthorhombic) peaks appeared.
© (1985) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yasuo Takagi, Steven A. Flessa, Keith L. Hart, David A. Pawlik, and Alan M. Kadin "Thermal Stability of W/C Multilayer Films", Proc. SPIE 0563, Applications of Thin Film Multilayered Structures to Figured X-Ray Optics, (6 May 1985); https://doi.org/10.1117/12.949653
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