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20 January 2005 Interferometric displacement sensors using sinusoidal phase-modulation and optical fibers
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Abstract
Two kinds of displacement sensors are described in which sinusoidal phase-modulating interferometers with optical fibers are utilized. Light reflected at an end face of the fiber is used as reference light in an interferometer of Fizeau type. A sensor is constructed with a laser diode interferometer in which the sinusoidal phase-modulation (SPM) of 1.5MHz-frequency is produced by modulating the injection current of the laser diode. The measurement time of the phase of the interference signal is 0.25μs and a displacement of an object is measured with an error less than 20nm. Another sensor is constructed with a superluminescent diode interferometer in which the SPM is produced by vibrating an output end of the optical fiber in the first interferometer of Fizeau type. A large displacement is measured by finding positions of a mirror in the second interferometer of Michelson type where the optical path difference is zero before and after the displacement. The sensor measures a distance in the range of 10mm with an error less than 20 nm.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Osami Sasaki and Takamasa Suzuki "Interferometric displacement sensors using sinusoidal phase-modulation and optical fibers", Proc. SPIE 5633, Advanced Materials and Devices for Sensing and Imaging II, (20 January 2005); https://doi.org/10.1117/12.579814
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