20 January 2005 Wavelength-shifting interferometry by a wide tunable laser source with a new phase-shifting technique
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Abstract
A wavelength-shifting interferometer has been constructed by using a wide-tunable Ti:sapphire laser for three-dimensional range measurement. The phase shifts in five steps by wavelength changes can be measured with an Schwider-Hariharan algorithm in conjunction with sub-fringe measurements by PZT movements in four steps. Experimental results for a step object have been shown.
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Masato Higashi, Takeshi Takahashi, Ribun Onodera, Yukihiro Ishii, "Wavelength-shifting interferometry by a wide tunable laser source with a new phase-shifting technique", Proc. SPIE 5633, Advanced Materials and Devices for Sensing and Imaging II, (20 January 2005); doi: 10.1117/12.580464; https://doi.org/10.1117/12.580464
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