9 February 2005 A wide-range metrology AFM and its applications
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In view of the fact that the application field of a dual tunneling-unit scanning tunneling microscope (DTU-STM) was strongly limited by sample conductivity, a dual imaging unit atomic force microscope (DIU-AFM) was developed for wide-range nano-metrology. A periodic grating is employed as a reference sample. The DIU-AFM simultaneously scans the grating and a test sample by using one single XY scanner. Their images thus have the same lateral size, and the length of the test sample image can be precisely measured by counting the number of periodic features of the reference grating. We further developed a new method of implementing wide-range nano-metrology. By alternatively moving the XY scanner in the X direction using a step motor, a series of pairs of images are obtained and can be spliced into two wide-range reference and test ones, respectively. Again, the two spliced images are of the same size, and the length of test image can be measured based on the reference grating features. In this way, wide-range metrology with nanometer order accuracy is successfully realized.
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Xiaofeng Lin, Xiaofeng Lin, Haijun Zhang, Haijun Zhang, Dongxian Zhang, Dongxian Zhang, } "A wide-range metrology AFM and its applications", Proc. SPIE 5635, Nanophotonics, Nanostructure, and Nanometrology, (9 February 2005); doi: 10.1117/12.576240; https://doi.org/10.1117/12.576240

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