9 February 2005 Development of optical phase shifter based on piezoelectric ceramic
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The phase shifter is necessary in the optical phase-shifting measurement. At present the phase shifter commonly used is approximately divided into the penetrance-type and the reflection-type. In this paper, a reflection-type phase shifter made of piezoelectric ceramic stackup assemble is developed. The assemble are constituted of the flat piezoelectric ceramic with parallel connection circuit and inline structure. The communication between the computer and MCU is by RS232. The D/A converter controlled by the MCU outputs 0~10V voltage. Then the voltage is amplified to 0~400V DC voltage by the designed linear DC amplifier. When this voltage loads on the piezoelectric ceramic stackup assemble, the assemble will axially extend 0~5mm. In this paper, the connecting types for the mechanical construction and circuit of the piezoelectric ceramic stackup assemble, the driving power and the DC amplifier with high linearity are all introduced. The whole system developed is standardized by using phase-interfering Michelson. The standardization and the practical application indicates that this system has excellent linearity and precision repeatability.
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Fusheng Yu, Fusheng Yu, Xiaoqin Shen, Xiaoqin Shen, Chunjuan Yao, Chunjuan Yao, Changlin Leng, Changlin Leng, } "Development of optical phase shifter based on piezoelectric ceramic", Proc. SPIE 5635, Nanophotonics, Nanostructure, and Nanometrology, (9 February 2005); doi: 10.1117/12.576245; https://doi.org/10.1117/12.576245


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