Investigation on long-range nanometer resolution grating moiré interferometer

Xingchun Chu; Haibao Lu; Tinzheng Chen; Juliang Cao

doi:10.1117/12.573294

9 February 2005 Investigation on long-range nanometer resolution grating moiré interferometer

Xingchun Chu, Haibao Lu, Tinzheng Chen, Juliang Cao

Proceedings Volume 5635, Nanophotonics, Nanostructure, and Nanometrology; (2005) https://doi.org/10.1117/12.573294
Event: Photonics Asia, 2004, Beijing, China

Abstract

A moiré interferometer system based on single metrology grating (SMG) that can achieve nanometer resolution is presented. By properly selecting the diffraction beam, different resolution can be realized with different diffracting orders. The measuring principle is described in detail. A new moiré fringes subdividing method is developed. This method can accurately deal with input signals which deviate from the orthogonal state by dynamically tracing the joints of input signals. So the stringent requirement for orthogonality of input signals is loosen. With the combination of the SMG and new subdividing method, the system can easily achieve nanometer resolution. A displacement measuring system, which resolution is 1nm and measure range is 400mm, is set up. And the experiment results of the system are given. It shows that the system has better anti-jamming ability to the orthogonal error of input signals than conventional systems.

Citation Download Citation

Xingchun Chu, Haibao Lu, Tinzheng Chen, and Juliang Cao "Investigation on long-range nanometer resolution grating moiré interferometer", Proc. SPIE 5635, Nanophotonics, Nanostructure, and Nanometrology, (9 February 2005); https://doi.org/10.1117/12.573294

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