9 February 2005 The experimental study of super-smooth surface processing technology for optical glass and sapphire component
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Abstract
This paper describes the super smooth surface optical processing methods for optical glass and sapphire components. The super smooth surfaces of optical glass through BFP (Bowl-Feed Polishing) method and sapphire through CMP (Chemo-Mechanical Polishing) method are produced respectively. Microstructures of each processing steps are measured through non-contact method with Zygo NV5022s. Finally, the experimental results are given: the roughness of both optical glass and sapphire component is around 0.5nm (rms or Ra).
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Chijuan Li, Chijuan Li, Jingling Xiao, Jingling Xiao, } "The experimental study of super-smooth surface processing technology for optical glass and sapphire component", Proc. SPIE 5635, Nanophotonics, Nanostructure, and Nanometrology, (9 February 2005); doi: 10.1117/12.573998; https://doi.org/10.1117/12.573998
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