Continuous micro-optics fabrication using halftone masks and proximity printing

Chuankai Qiu; Changtao Wang; Chunlei Du; Xiaochun Dong

doi:10.1117/12.576373

7 February 2005 Continuous micro-optics fabrication using halftone masks and proximity printing

Chuankai Qiu, Changtao Wang, Chunlei Du, Xiaochun Dong

Proceedings Volume 5636, Holography, Diffractive Optics, and Applications II; (2005) https://doi.org/10.1117/12.576373
Event: Photonics Asia, 2004, Beijing, China

Abstract

It is reported in this paper a method to fabricate three dimensional continuous micro-optical structures using half tone masks and proximity printing. The frequency modulation coded half tone masks are employed to obtain the predetermined exposure distribution. Several components like Cylinder microlens arrays, phase correctors are realized in photoresists.

Citation Download Citation

Chuankai Qiu, Changtao Wang, Chunlei Du, and Xiaochun Dong "Continuous micro-optics fabrication using halftone masks and proximity printing", Proc. SPIE 5636, Holography, Diffractive Optics, and Applications II, (7 February 2005); https://doi.org/10.1117/12.576373

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