Design and fabrication of two-dimensional nonseparable Dammann gratings

Changtao Wang; Chunlei Du; Li Pan; Qiang Liu

doi:10.1117/12.573262

7 February 2005 Design and fabrication of two-dimensional nonseparable Dammann gratings

Changtao Wang, Chunlei Du, Li Pan, Qiang Liu

Proceedings Volume 5636, Holography, Diffractive Optics, and Applications II; (2005) https://doi.org/10.1117/12.573262
Event: Photonics Asia, 2004, Beijing, China

Abstract

It is presented in this paper an improved simulated annealing algorithm with the ability of increasing sampling resolution and generating grating pattern with smoothed borders to design two-dimensional (2-D) non-separable Damann grating. Numerical simulations are performed for the lateral fabrication error accompanied in the lithography procedure and the measured experimental results of the fabricated grating agree with the simulation.

Citation Download Citation

Changtao Wang, Chunlei Du, Li Pan, and Qiang Liu "Design and fabrication of two-dimensional nonseparable Dammann gratings", Proc. SPIE 5636, Holography, Diffractive Optics, and Applications II, (7 February 2005); https://doi.org/10.1117/12.573262

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