7 February 2005 Design and fabrication of two-dimensional nonseparable Dammann gratings
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It is presented in this paper an improved simulated annealing algorithm with the ability of increasing sampling resolution and generating grating pattern with smoothed borders to design two-dimensional (2-D) non-separable Damann grating. Numerical simulations are performed for the lateral fabrication error accompanied in the lithography procedure and the measured experimental results of the fabricated grating agree with the simulation.
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Changtao Wang, Chunlei Du, Li Pan, Qiang Liu, "Design and fabrication of two-dimensional nonseparable Dammann gratings", Proc. SPIE 5636, Holography, Diffractive Optics, and Applications II, (7 February 2005); doi: 10.1117/12.573262; https://doi.org/10.1117/12.573262

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