7 February 2005 Design and fabrication of two-dimensional nonseparable Dammann gratings
Author Affiliations +
Abstract
It is presented in this paper an improved simulated annealing algorithm with the ability of increasing sampling resolution and generating grating pattern with smoothed borders to design two-dimensional (2-D) non-separable Damann grating. Numerical simulations are performed for the lateral fabrication error accompanied in the lithography procedure and the measured experimental results of the fabricated grating agree with the simulation.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Changtao Wang, Changtao Wang, Chunlei Du, Chunlei Du, Li Pan, Li Pan, Qiang Liu, Qiang Liu, } "Design and fabrication of two-dimensional nonseparable Dammann gratings", Proc. SPIE 5636, Holography, Diffractive Optics, and Applications II, (7 February 2005); doi: 10.1117/12.573262; https://doi.org/10.1117/12.573262
PROCEEDINGS
8 PAGES


SHARE
RELATED CONTENT

High divergent 2D grating
Proceedings of SPIE (November 10 2014)
Modified multilevel phase kinoform for array generator
Proceedings of SPIE (April 30 1992)
Reflective 16-phase-level kinoform for beam array generator
Proceedings of SPIE (January 12 1993)

Back to Top