7 February 2005 Fabrication of varied-line-space grating by elastic optics
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Abstract
We demonstrate a method to fabricate varied-line-spacing grating by employing elastic medium with variable vertical section. The advantages of this technique include continuous diversity of variation of line-space, high fabrication efficiency and low cost, etc. It is very difficult or unrealizable to produce this variation of line-space by traditional interference lithography. This kind of grating can be used in the optical position sensor and it can improve the precision of the sensor.
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Yongjun Xie, Shiping He, Shaojun Fu, "Fabrication of varied-line-space grating by elastic optics", Proc. SPIE 5636, Holography, Diffractive Optics, and Applications II, (7 February 2005); doi: 10.1117/12.571587; https://doi.org/10.1117/12.571587
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