7 February 2005 Holographic apparatus for forming nanograting device
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Abstract
This paper studies the fabrication of the nano-scale grating using laser beam interference. The beams come from a He-Cd laser @442nm were interfered with each other inside a prism, and form the interference pattern on the photoresist layer that coated on the bottom of the prism. The method can fabricate gratings with period that less than the half of the wavelength of the interference laser beams. It becomes a promising process that can fabricate a grating with periods of 160nm without using UV light source. The experimental result is also demonstrated.
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Yung Hsin Chen, Yung Hsin Chen, Wann Diing Tyan, Wann Diing Tyan, Pong Lai, Pong Lai, Ying Tsung Lu, Ying Tsung Lu, } "Holographic apparatus for forming nanograting device", Proc. SPIE 5636, Holography, Diffractive Optics, and Applications II, (7 February 2005); doi: 10.1117/12.569243; https://doi.org/10.1117/12.569243
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