7 February 2005 Influence of fabrication parameters on groove profile of blazed gratings made with two-step holographic technique
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The two-step holographic technique of fabricating blazed gratings has been successfully applied to common positive photoresist. Influence of three fabrication parameters in the second step on groove profile of blazed gratings was studied experimentally. The three fabrication parameters are exposure, incident angle of laser beam and development time. The exposure distribution on the cross-section of one groove stripe of grating was modeled. Results of experiment and modeling with various exposures reveal that the technique is effective only when the symmetrical contour lines of exposure in the first step fade out with increasing second exposure. With other parameters fixed, experiments were also carried out with the beam incident angle varying from 10° to 80° and with the development time varying from 1 s to 9 s. Blazed gratings with quasi-triangular are obtained when incident angle reaches 40° and when development time reaches 5 s. Scanning electron micrographs of the results are presented. Blazed gratings with observed blaze angles of 20° to 50° were obtained by changing the incident angle. Efficiencies of different diffraction orders for gratings with various incident angles are also given.
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Sensen Li, Sensen Li, Shou Liu, Shou Liu, Xiangsu Zhang, Xiangsu Zhang, Ying Liu, Ying Liu, Xuechang Ren, Xuechang Ren, } "Influence of fabrication parameters on groove profile of blazed gratings made with two-step holographic technique", Proc. SPIE 5636, Holography, Diffractive Optics, and Applications II, (7 February 2005); doi: 10.1117/12.573828; https://doi.org/10.1117/12.573828

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