7 February 2005 LCD-based low spatial coherence interferometer
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Abstract
An interferometer based on the spatial coherence detection has been developed for absolute height measurement. The location of a coherence peak resulting from the illumination of an extended quasi-monochromatic spatially incoherent light source with zone-plate-like spatial structure gives the longitudinal depth information. Besides simplifying the control of the light source structure, LCD-SLM eliminates the mechanical movement. Experiments of step height detection and profilometry of an object with a rough surface are presented that demonstrate the validity of the principle.
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Zhihui Duan, Pavel Pavlicek, Yoko Miyamoto, Mitsuo Takeda, "LCD-based low spatial coherence interferometer", Proc. SPIE 5636, Holography, Diffractive Optics, and Applications II, (7 February 2005); doi: 10.1117/12.576101; https://doi.org/10.1117/12.576101
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