Perturbation approach for analyzing microstructures

Tuomas Vallius

doi:10.1117/12.577019

7 February 2005 Perturbation approach for analyzing microstructures

Tuomas Vallius

Proceedings Volume 5636, Holography, Diffractive Optics, and Applications II; (2005) https://doi.org/10.1117/12.577019
Event: Photonics Asia, 2004, Beijing, China

Abstract

Perturbations arising from sharp discontinuities of surface relief profiles can have significant effects on the field transmitted through diffractive structures. A method utilizing these perturbations is presented for efficient analysis of the response of surface profiles in the non-paraxial domain. Comparison with rigorous diffraction theory proves the method reliable and the numerical feasibility of the approach is much better than that of rigorous methods.

Citation Download Citation

Tuomas Vallius "Perturbation approach for analyzing microstructures", Proc. SPIE 5636, Holography, Diffractive Optics, and Applications II, (7 February 2005); https://doi.org/10.1117/12.577019

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KEYWORDS

Diffraction

Beam splitters

Binary data

Diffraction gratings

Analog electronics

Phase shifts

Transition metals

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