7 February 2005 Study on the fabrication of combined BSG-CSG element
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Abstract
In the final optics assembly of ICF driver, Diffractive Optical Elements (DOEs) are applied to achieve some important functions. Due to the advantage of easy integration, DOEs that achieve different functions can be combined into one element, and thus the system structure and performance of ICF driver can be optimized. In this paper, we present a new means to fabricate color separation grating (CSG) and beam sampling grating (BSG) on two surfaces of one fused-silica substrate with two-surface exposure method. The mask for CSG can be fabricated with common optical method since the period of CSG is large; whereas the mask for BSG cannot be made with normal micro-fabrication system whose resolution cannot meet the requirement of fabrication precision of slowly changed BSG fringes (from 2μm to 4μm). Therefore, we use e-beam direct writing method to fabricate mask for BSG. The alignment of CSG and BSG is designed in accordance with the requirement of actual system. Thus the functions of harmonic wave separation and beam sampling are realized through one silica plate. The satisfying experimental results are illustrated.
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Yixiao Zhang, Yixiao Zhang, Fuhua Gao, Fuhua Gao, Shenglin Wen, Shenglin Wen, Qian Liu, Qian Liu, Yongkang Guo, Yongkang Guo, Jin Zhang, Jin Zhang, } "Study on the fabrication of combined BSG-CSG element", Proc. SPIE 5636, Holography, Diffractive Optics, and Applications II, (7 February 2005); doi: 10.1117/12.574392; https://doi.org/10.1117/12.574392
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