10 February 2005 A novel aspheric surface testing method using part-compensating lens
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Abstract
In contrast to null compensator method in aspheric surface testing, a novel method is presented that uses part-compensating lens and digital moire phase-shift interferometry. Researches are made on measurement principle, design method of part-compensating lens and calibrating lens, and calibrating method. Experiment is made by using spherical surface to simulate aspheric surface testing. The measurement precision is that the P-V value of the testing error can be λ/10. Using the method presented in this paper, the structure of compensator is much simpler than that of null compensator. And one part-compensating lens can be used to test different aspheric surfaces in certain range.
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Huilan Liu, Huilan Liu, Qun Hao, Qun Hao, Qiudong Zhu, Qiudong Zhu, Dingguo Sha, Dingguo Sha, Chunxi Zhang, Chunxi Zhang, } "A novel aspheric surface testing method using part-compensating lens", Proc. SPIE 5638, Optical Design and Testing II, (10 February 2005); doi: 10.1117/12.578624; https://doi.org/10.1117/12.578624
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