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10 February 2005 A novel aspheric surface testing method using part-compensating lens
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In contrast to null compensator method in aspheric surface testing, a novel method is presented that uses part-compensating lens and digital moire phase-shift interferometry. Researches are made on measurement principle, design method of part-compensating lens and calibrating lens, and calibrating method. Experiment is made by using spherical surface to simulate aspheric surface testing. The measurement precision is that the P-V value of the testing error can be λ/10. Using the method presented in this paper, the structure of compensator is much simpler than that of null compensator. And one part-compensating lens can be used to test different aspheric surfaces in certain range.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Huilan Liu, Qun Hao, Qiudong Zhu, Dingguo Sha, and Chunxi Zhang "A novel aspheric surface testing method using part-compensating lens", Proc. SPIE 5638, Optical Design and Testing II, (10 February 2005);


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