10 February 2005 A novel high-speed optical scanning platform
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Recent advancements in precision engineering have promoted the use of high precision servo mechanism to enhance optical system performance. Present servo mechanisms are able to aid the optical resolution by driving the scanning mirrors to achieve higher resolutions than the traditional imaging systems. To compete with the still imaging systems, the servo mechanisms must achieve very high operation speeds while maintaining highly accurate positioning. This paper introduces a novel, high speed, high precision servo mechanism for the optical scanner. The proposed design uses piezoelectric transducers (PZT) with flexure joints in place of the conventional servo motor drive. The arrangement does not suffer from the backlash problem or the problem with slipping during starting. The study uses the dynamics simulation and finite element analysis (FEA) software for simulation and analysis. The FEA results provide information for the structural prosperities such as the vibration modal type, resonance frequencies, steady state deformation... etc. The analytical data then provide the basis to derive a system model for control synthesis. The dynamic simulation of the control system is accomplished by an integration of the control software with the FEA software. The control output updates the FEA results at every frame time during the simulation. The dynamic simulation results provide all the useful physical properties of the mechanism for prototype design references.
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Yea-Chin Yeh, Yea-Chin Yeh, Jia-Yush Yen, Jia-Yush Yen, Jyh-Fa Lee, Jyh-Fa Lee, Yung-Hao Peng, Yung-Hao Peng, } "A novel high-speed optical scanning platform", Proc. SPIE 5638, Optical Design and Testing II, (10 February 2005); doi: 10.1117/12.575488; https://doi.org/10.1117/12.575488

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