10 February 2005 Analysis of alignment error in asphere testing using a corrector
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The characteristics and effects of alignment error on test results are analysed in this paper. The mathematical model are established, the least square method is used to determine the misalignment. Procedures are presented that allow for separation of misalignment from misfigure in asphere testing. The misalignment-induced aberrations by corrector and the support of the mirror can be calculated and subtracted from segment interferogram so that only true misfigure remains. The accuracy of the system can reach up to 0.028λ(λ=632.8nm).
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Donglin Xue, Donglin Xue, Ligong Zheng, Ligong Zheng, Xuejun Zhang, Xuejun Zhang, } "Analysis of alignment error in asphere testing using a corrector", Proc. SPIE 5638, Optical Design and Testing II, (10 February 2005); doi: 10.1117/12.574991; https://doi.org/10.1117/12.574991

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