Analysis of alignment error in asphere testing using a corrector

Donglin Xue; Ligong Zheng; Xuejun Zhang

doi:10.1117/12.574991

10 February 2005 Analysis of alignment error in asphere testing using a corrector

Donglin Xue; Ligong Zheng; Xuejun Zhang

Author Affiliations +

Proceedings Volume 5638, Optical Design and Testing II; (2005) https://doi.org/10.1117/12.574991
Event: Photonics Asia, 2004, Beijing, China

Abstract

The characteristics and effects of alignment error on test results are analysed in this paper. The mathematical model are established, the least square method is used to determine the misalignment. Procedures are presented that allow for separation of misalignment from misfigure in asphere testing. The misalignment-induced aberrations by corrector and the support of the mirror can be calculated and subtracted from segment interferogram so that only true misfigure remains. The accuracy of the system can reach up to 0.028λ(λ=632.8nm).

Citation Download Citation

Donglin Xue, Donglin Xue, Ligong Zheng, Ligong Zheng, Xuejun Zhang, Xuejun Zhang, } "Analysis of alignment error in asphere testing using a corrector", Proc. SPIE 5638, Optical Design and Testing II, (10 February 2005); doi: 10.1117/12.574991; https://doi.org/10.1117/12.574991

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