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10 February 2005 Experimental research on thickness-monitoring techniques of non-quarter films
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The precise control of the film thickness in the film deposition process is the key to depositing optical coating, it is difficult to get ideal film thickness by general turn-point value monitoring. The characteristics of four film thickness monitoring techniques, quartz crystal monitoring technique and common reflectance overshoot-turning point monitoring technique and turn-point monitoring technique with different monitoring wavelength at each layer and mutative overshoot-turning point monitoring technique, are analyzed in this thesis. The contrast experiments adopting the four monitoring techniques respectively to a non-quarter A.R. coating were made under the same technical condition. The experiment results have indicated that mutative overshoot-turning point monitoring technique can get more precise thickness control to non-quarter films than the other thickness monitoring techniques.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Xiaohui Zhang, Xiaodan Gao, and Jionghui Rao "Experimental research on thickness-monitoring techniques of non-quarter films", Proc. SPIE 5638, Optical Design and Testing II, (10 February 2005);


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