10 February 2005 Optimizing parameters for magnetorheological finishing supersmooth surface
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This paper presents a reasonable approach to this issue, i.e., computer controlled magnetorheological finishing (MRF). In MRF, magnetically stiffened magnetorheological (MR) abrasive fluid flows through a preset converging gap that is formed by a workpiece surface and a moving rigid wall, to create precise material removal and polishing. Tsinghua University recently completed a project with MRF technology, in which a 66 mm diameter, f/5 parabolic mirror was polished to the shape accuracy of λ/17 RMS (λ=632.8nm) and the surface roughness of 1.22 nm Ra. This was done on a home made novel aspheric computer controlled manufacturing system. It is a three-axis, self-rotating wheel machine, the polishing tool is driven with one motor through a belt. This paper presents the manufacturing and testing processes, including establish the mathematics model of MRF optics on the basis of Preston equation, profiler test and relative coefficients, i.e., pressure between workpiece and tool, velocity of MR fluid in polishing spot, tolerance control of geometrical parameters such as radius of curvature and conic constant also been analyzed in the paper. Experiments were carried out on the features of MRF. The results indicated that the required convergent speed, surface roughness could be achieved with high efficiency.
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Haobo Cheng, Zhijing Feng, and Yingwei Wang "Optimizing parameters for magnetorheological finishing supersmooth surface", Proc. SPIE 5638, Optical Design and Testing II, (10 February 2005); doi: 10.1117/12.568383; https://doi.org/10.1117/12.568383

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