Performance analyzing and parameter revising for soft x-ray multilayer mirrors at E=60eV

Limin Song; Shaocheng Li; Rongxi He

doi:10.1117/12.570556

10 February 2005 Performance analyzing and parameter revising for soft x-ray multilayer mirrors at E=60eV

Limin Song, Shaocheng Li, Rongxi He

Proceedings Volume 5638, Optical Design and Testing II; (2005) https://doi.org/10.1117/12.570556
Event: Photonics Asia, 2004, Beijing, China

Abstract

In this paper, a Mo/Si multilayer mirror of normal incidence at E=60eV was firstly analyzed. From the measurement curves of a small angle x ray diffraction, the property of interfaces and the parameters including period thickness and roughness were gained. Through the analyzing, we found that performance is not good, the peak reflectivity is low and is not correspond with 60eV. Secondly, a revised design using Simulated Annealing arithmetic was applied in it. The revised design results shows a promising mirror at 60eV and are consistent with the results of the program of optical coating technology R&D center in Shanghai Institute of Optics and Fine Mechanics.

Citation Download Citation

Limin Song, Shaocheng Li, and Rongxi He "Performance analyzing and parameter revising for soft x-ray multilayer mirrors at E=60eV", Proc. SPIE 5638, Optical Design and Testing II, (10 February 2005); https://doi.org/10.1117/12.570556

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