Research on novel beam homogenizer for excimer laser and evaluating norm of beam uniformity

Hong-xia Li; Qi-hong Lou; Zhenhuan Ye; J. Dong; Y. Wei; L. Ling

doi:10.1117/12.575934

10 February 2005 Research on novel beam homogenizer for excimer laser and evaluating norm of beam uniformity

Hong-xia Li, Qi-hong Lou, Zhenhuan Ye, J. Dong, Y. Wei, L. Ling

Proceedings Volume 5638, Optical Design and Testing II; (2005) https://doi.org/10.1117/12.575934
Event: Photonics Asia, 2004, Beijing, China

Abstract

A novel trapezoid prism homogenizer is used to improve the uniformity of output energy density of excimer laser. The principle and the design requirements of the novel trapezoid prism are analyzed theoretically, and the optimal position of uniform section is calculated. Using this novel homogenizer, the fluctuation of beam uniformity of XeCl excimer laser is less than 4%. The result is better than that obtained from a normal prism homogenizer. The evaluating norms of excimer laser beam uniformity are analyzed in detail. The process window defines uniformity requirements of excimer laser, while the energy fraction answers the problem of useful percentage of energy within a giving process window. The top-hat factor defines the uniformity in the whole energy range, and the dynamic range is the variation range of screen-homogenizer in the specific application. Using this evaluating norm the uniform beam obtained by the novel trapezoid prism homogenizer is analyzed.

Citation Download Citation

Hong-xia Li, Qi-hong Lou, Zhenhuan Ye, J. Dong, Y. Wei, and L. Ling "Research on novel beam homogenizer for excimer laser and evaluating norm of beam uniformity", Proc. SPIE 5638, Optical Design and Testing II, (10 February 2005); https://doi.org/10.1117/12.575934

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