The position relationship in multi-interferograms

Wei Wang; Qing Wang; Yong He; Lei Chen

doi:10.1117/12.576440

10 February 2005 The position relationship in multi-interferograms

Wei Wang, Qing Wang, Yong He, Lei Chen

Proceedings Volume 5638, Optical Design and Testing II; (2005) https://doi.org/10.1117/12.576440
Event: Photonics Asia, 2004, Beijing, China

Abstract

In the high accuracy absolute interferometry, several interferograms from different objects has to be calculated. This paper introduces a technique that ensures the spatial positions of the interferograms coinciding correctly (spatial unity). In this technique the characteristic parameters of interferograms’ position are picked up in the sample matrix coordinates system. And all these characteristic parameters are compared and fed back to the operator. Then the operator aligns the optical path precisely until it achieves the conditions for the absolute measurement. Computer guards the whole process, so the results are more reliability. The absolute measurement of cylindrical surface using this method has been realized and high-accuracy results are obtained.

Citation Download Citation

Wei Wang, Qing Wang, Yong He, and Lei Chen "The position relationship in multi-interferograms", Proc. SPIE 5638, Optical Design and Testing II, (10 February 2005); https://doi.org/10.1117/12.576440

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