10 February 2005 Ultrahighly accurate 3D profilometer
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Abstract
We have developed an Ultrahigh-Accurate 3-D Profilometer (UA3P), which, using a new, in-house-developed atomic force probe, has an accuracy of 10 nm. It is capable of measuring corners as small as 2 micro meter in radius and can cover an area up to 400 x 400 x 90 (mm), providing a powerful boost to nano-level processing. A commercial product was introduced in 1994. Examples of the key components made possible by this technology include aspherical lenses (used for a Blu-ray Disc device, a next-generation DVD, digital cameras, cellular phones, optical communications), free form lenses (used for frennel lens common to CD and DVD, laser printer lens, multi focus glass lens, cubic phase plate to extend depth of focus), gigabit semiconductor wafers, hard discs, air conditioner scroll vanes, DVC cylinders. The premiere ultra high-precision three-dimensional profilometer delivers superb performance using a variety of micro-measurements for a wide range of applications.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hideki Tsutsumi, Keiichi Yoshizumi, Hiroyuki Takeuchi, "Ultrahighly accurate 3D profilometer", Proc. SPIE 5638, Optical Design and Testing II, (10 February 2005); doi: 10.1117/12.573774; https://doi.org/10.1117/12.573774
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