23 December 2004 The performance of micromachined membrane deformable mirror for adaptive optics
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Abstract
The voltage-decoupling model for a 37-channel micromachined membrane deformable mirror is established through theoretically and experimentally analyzing the fitting aberration of a continuous-surface deformable mirror. The function between voltage and displacement of an actuator, the linear superposing among the actuators for micromachined membrane deformable mirror are analyzed by means of the measured influence function of actuators. The fitting of the first 36-order Zernike mode is carried out. The analysis shows that micromachined membrane deformable mirror can be applied to correcting low order aberration. This research provides the basis and guideline for designing the adaptive optical system based on micromachined membrane deformable mirror, thus offers a theoretical basis and reference for the application of the deformable mirror.
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Ende Li, Haifeng Duan, Yun Dai, Haiying Wang, Kai Chen, Yudong Zhang, "The performance of micromachined membrane deformable mirror for adaptive optics", Proc. SPIE 5639, Adaptive Optics and Applications III, (23 December 2004); doi: 10.1117/12.580424; https://doi.org/10.1117/12.580424
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