A preliminary study on MBE-grown HgCdTe two-color FPAs

Zhenhua Ye; Jun Wu; Xiaoning Hu; Yan Wu; Qingjun Liao; Haiyan Zhang; Jianxin Wang; Ruijun Ding; Li He

doi:10.1117/12.572167

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10 January 2005 A preliminary study on MBE-grown HgCdTe two-color FPAs

Zhenhua Ye, Jun Wu, Xiaoning Hu, Yan Wu, Qingjun Liao, Haiyan Zhang, Jianxin Wang, Ruijun Ding, Li He

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Proceedings Volume 5640, Infrared Components and Their Applications; (2005) https://doi.org/10.1117/12.572167
Event: Photonics Asia, 2004, Beijing, China

Abstract

This paper presents the recent progress on the study of device processings at multilayer HgCdTe film for integrated two-color (SWIR/MWIR) n-p-P-P-N detector arrays. The four-layer p-P-P-N heterostructures Hg_1-xCd_xTe film needed to achieve two color detector arrays was grown by molecular beam epitaxy (MBE) on (211)B oriented GaAs substrates. The secondary ion mass spectroscopy (SIMS) data for the HgCdTe film was obtained. The p-type layer on top of a thin P-type potential barrier layer and the SWIR P-on-N homojunction photodiode formed in-situ during MBE growth using indium impurity doping was processed into the MWIR planar photodiode by selective B⁺-implantation. The preliminary 256×1 linear arrays of SWIR/MWIR HgCdTe two-color FPAs detector were then achieved by mesa isolation, side-wall passivation and contact metallization. At 78K, the average R0A values of SWIR and MWIR are 3.852×10⁵ Wcm² and 3.015×10² Wcm², and the average peak detectivities D_λp^* are 1.57×10¹¹cmHz^1/2/W and 5.63×10¹⁰ cmHz^1/2/W respectively. The SWIR photodiode cut-off wavelength is 3.04μm and the MWIR photodiode cut-off wavelength is 5.74μm, quite consistent with the initial device design. The SWIR response spectrum of the two-color detector with a distinct fall-off at shorter wavelength regime was discussed especially.

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Zhenhua Ye, Jun Wu, Xiaoning Hu, Yan Wu, Qingjun Liao, Haiyan Zhang, Jianxin Wang, Ruijun Ding, and Li He "A preliminary study on MBE-grown HgCdTe two-color FPAs", Proc. SPIE 5640, Infrared Components and Their Applications, (10 January 2005); https://doi.org/10.1117/12.572167

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