30 December 2004 A novel system to measure MEMS motion
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Abstract
To provide useful insight into the reliability of silicon micromachined resonator, a measurement system of resonator vibration is presented to check the dynamic characteristics of resonator. The system utilizes heterodyne laser Doppler techniques and acquires the relation between resonator motion and Doppler shift of scatter beam. The vibration principle of resonator was expatiated detailedly and a special driving control circuit was also designed. Experiments on driving and measuring double-ended tuning fork vibration were carried out. The frequency of driving signal is 2.4 kHz and the peak-to-peak value of driving voltage is 140 V. Experimental results indicate that the system can measure dynamic characteristics of Micro-electro-mechanical system (MEMS) well.
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Changlin Leng, Guoxiong Zhang, Fusheng Yu, Chengzhi Jiang, Ying Zhong, "A novel system to measure MEMS motion", Proc. SPIE 5641, MEMS/MOEMS Technologies and Applications II, (30 December 2004); doi: 10.1117/12.574167; https://doi.org/10.1117/12.574167
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