30 December 2004 Analysis of the structures and characteristics for an InP-based micromechanical tunable filter
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Abstract
In this letter,a InP-based micromechanical tuneable filter by electrostatic actuation is introduced. Through simulation of the DBR reflectance spectra and the F-P cavity transimission spectra,the filter performance is studied. By means of finite element method,the tunning characteristics of the filters based on several typical micromechanical structures are presented. The dynamical behavior of the top mirror is investigated.In addition,the flatness of the top mirror are compared among these structures. It would be valuable reference for InP-based micromechanical F-P cavity device design and optimization.
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Bin Chen, Zhen Zhou, Yongqing Huang, Xiaomin Ren, "Analysis of the structures and characteristics for an InP-based micromechanical tunable filter", Proc. SPIE 5641, MEMS/MOEMS Technologies and Applications II, (30 December 2004); doi: 10.1117/12.578453; https://doi.org/10.1117/12.578453
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