30 December 2004 Analysis on the optical MEMS pressure sensors based on circular multilayer diaphragm
Author Affiliations +
Abstract
An optical MEMS pressure sensor based on multi-layer circular diaphragm has been analyzed by utilizing the shell theory and characteristic matrix methods. Finite element methods are used to analyze the deflection of circular diaphragm with the residual stress effect considered. Simulation results are given by using FEM software tools ANSYS. The analytic expressions for the absolute reflectance of multi-layer circular diaphragm structure are derived. The results are valid for the most optical MEMS pressure sensors based on Fabry-Perot interferometer.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ming Li, Ming Li, Ming Wang, Ming Wang, Tinting Wang, Tinting Wang, Hua Rong, Hua Rong, Xuxing Chen, Xuxing Chen, } "Analysis on the optical MEMS pressure sensors based on circular multilayer diaphragm", Proc. SPIE 5641, MEMS/MOEMS Technologies and Applications II, (30 December 2004); doi: 10.1117/12.573685; https://doi.org/10.1117/12.573685
PROCEEDINGS
8 PAGES


SHARE
RELATED CONTENT


Back to Top