Design considerations for electrostatically tunable InP-based Fabry-Perot filters for WDM applications

Mithilesh A. Shah; Vicknesh Shanmugan; Akkipeddi Ramam

doi:10.1117/12.577776

30 December 2004 Design considerations for electrostatically tunable InP-based Fabry-Perot filters for WDM applications

Mithilesh A. Shah, Vicknesh Shanmugan, Akkipeddi Ramam

Proceedings Volume 5641, MEMS/MOEMS Technologies and Applications II; (2004) https://doi.org/10.1117/12.577776
Event: Photonics Asia, 2004, Beijing, China

Abstract

The use of micromachined tunable Fabry-Perot interferometers based on compound semiconductors with an integrated photodetector have earlier been proposed [1-3] for fiber optic communications employing Wavelength Division Multiplexing (WDM) for wavelengths around 1.55 μm. The variation of the Fabry-Perot cavity length in these devices is achieved by electrostatic actuation induced movements of a Distributed Bragg Reflector (DBR) mirror suspended by beams. A new filter design has been proposed and its electrostatic actuation induced deflection has been investigated along with three different filter designs using Finite Element Analysis (FEA). Using a mathematical model, deflection is analytically calculated and compared with FEA results. Due to the way in which the mirror is integrated with suspending framework of beams, bending within the mirror during actuation cannot be averted. The filter’s optical performance demands that mirror remain so flat that the maximum bending deflection is 1 nm for the mirror of given dimensions. Using a criterion based on mechanical and optical considerations the length of the beams suspending the mirror has been optimized for each of filter designs under investigation.

Citation Download Citation

Mithilesh A. Shah, Vicknesh Shanmugan, and Akkipeddi Ramam "Design considerations for electrostatically tunable InP-based Fabry-Perot filters for WDM applications", Proc. SPIE 5641, MEMS/MOEMS Technologies and Applications II, (30 December 2004); https://doi.org/10.1117/12.577776

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