30 December 2004 Electromagnetic MEMs eight-channel variable optical attenuator array
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An eight-channel variable optical attenuator (VOA) array fabricated by MEMS technology is presented. Based on micro electromagnetic actuation, the attenuation level is adjusted by changing the radial offset between the input/output optical fiber. The relationship between the attenuation and the offset was analyzed based on wave-guide transmission theory. The structure parameter was determined through mechanics and magnetic circuit analysis. The device was fabricated and packaged by micromachining technology. The packaged volume of the device is 80×40×12mm3. According to the experiment results, the insertion loss is less than 1dB, the polarization dependent loss is less than 0.1dB, dynamic range is above 35dB and the driving voltage is less than 5V. It is proved to be a low cost, high performance passive device for future all-optical-networks.
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Xuhan Dai, Xuhan Dai, Xiaolin Zhao, Xiaolin Zhao, Guifu Ding, Guifu Ding, Bingchu Cai, Bingchu Cai, } "Electromagnetic MEMs eight-channel variable optical attenuator array", Proc. SPIE 5641, MEMS/MOEMS Technologies and Applications II, (30 December 2004); doi: 10.1117/12.574536; https://doi.org/10.1117/12.574536

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