30 December 2004 Structure design of Si-based M-Z interference acceleration seismic geophone
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Abstract
A novel Si-based MOEMS acceleration seismic geophone, based on M-Z interferometry, is present in this paper. In one silicon chip, several elements including four silicon beams,seismic mass, a polarizer, M-Z waveguide interferometer and acousto-optic phase modulator are integrated. The working principle and the optimization structure design of the acceleration seismic geophone are given. The simulation result performed in FEM software ANSYS agrees with the theoretical analysis well. The main design parameters of the geophone system is as following: resonance frequency: 1353 Hz; phase detection sensitivity ΔΦ/a: 1.2×10-4rad/m/s2.
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Bo Wu, Bo Wu, Caihe Chen, Caihe Chen, Xiaoling Zhang, Xiaoling Zhang, Yuming Cui, Yuming Cui, Guangpeng Ma, Guangpeng Ma, Yanjun Zhang, Yanjun Zhang, Juanjuan Zhong, Juanjuan Zhong, } "Structure design of Si-based M-Z interference acceleration seismic geophone", Proc. SPIE 5641, MEMS/MOEMS Technologies and Applications II, (30 December 2004); doi: 10.1117/12.573534; https://doi.org/10.1117/12.573534
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