30 December 2004 The deflection and frequency analysis of the inhomogeneous silicon cantilever beam for microrelay
Author Affiliations +
Abstract
The inhomogeneous silicon cantilever beam is used to the design of micro-relay, compared the properties with the inhomogeneous and homogeneous cantilever beam, we get the results as: the inhomogeneous cantilever beam has a lower drive power than that of homogeneous; when the same drive power, the pressure of the touch point of the inhomogeneous cantilever is greater than that of homogeneous, but the frequency of the inhomogeneous cantilever is lower than that of homogeneous. In some special cases, if the frequency and dynamic response does not require high precision, the inhomogeneous cantilever beam is a good choice; it can obtain a low driver power and high pressure on the touch point for the micro-relay. The deflection of and the frequency of the analysis of the inhomogeneous silicon cantilever beam for micro-relay is put forward in the paper.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Huinan Hong, Guoqing Hu, Guangwen Chen, Wenyan Liu, "The deflection and frequency analysis of the inhomogeneous silicon cantilever beam for microrelay", Proc. SPIE 5641, MEMS/MOEMS Technologies and Applications II, (30 December 2004); doi: 10.1117/12.569014; https://doi.org/10.1117/12.569014
PROCEEDINGS
7 PAGES


SHARE
Back to Top