30 December 2004 The microfabrication using powder materials with excimer laser
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Abstract
As laser microfabrication develops fast more and more micro parts of MEMS are produced with laser micro processing technology. Excimer laser ablation is a versatile tool for the micro machining of various materials. Excimer laser materials processing, which is performed in most cases using a mask projection system forms a 3D shape by ablation material. Recently a large number of articles about polymer ablation with excimer lasers have appeared. However the powder material especially metallic powder is paid little attention in excimer laser micro machining. In this paper several types of powder material are investigated in excimer laser ablation. The ablation rate of different powder materials with various fluence ranges, wavelengths, and pulse lengths are studied in experiment. The parameters of excimer laser were optimized to fabricate a micro part. The diameter of about 100 micron gear made of nano powder was finally produced with a mask project system using nanopowder. This method is more efficient than laser writing with a focal spot.
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Jimin Chen, Jimin Chen, Canfu Yue, Canfu Yue, Yu Zhang, Yu Zhang, Xubao Wang, Xubao Wang, Tiechuan Zuo, Tiechuan Zuo, } "The microfabrication using powder materials with excimer laser", Proc. SPIE 5641, MEMS/MOEMS Technologies and Applications II, (30 December 2004); doi: 10.1117/12.570167; https://doi.org/10.1117/12.570167
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