30 December 2004 The study on the compound x-ray refractive lens using LIGA technique
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Abstract
A theoretical method of focusing X-rays by the compound X-ray refractive lens is presented in this paper. The authors report their resent theoretical results including the material selection and structure parameters for such a device. As an example, a compound X-ray refractive lens with PMMA material is designed. The detailed fabrication process of the PMMA compound lens by LIGA technology is described. Moreover, some measured results by means of SEM are also shown. The structure height of one of the PMMA compound lens is measured to be 500μm.
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Jingqiu Liang, Zichun Le, Liangqiang Peng, Weibiao Wang, Weihua Lan, Anjie Ming, Futing Yi, Jian Ye, Bisheng Quan, Jinsong Yao, Ming Xuan, Lijun Wang, "The study on the compound x-ray refractive lens using LIGA technique", Proc. SPIE 5641, MEMS/MOEMS Technologies and Applications II, (30 December 2004); doi: 10.1117/12.570760; https://doi.org/10.1117/12.570760
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