30 December 2004 Torsion-mirror optical actuators with compound driving structures
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A new kind of torsion-mirror optical actuators with compound driving structures is reported. The advanced compound driving structures are made up of plate-electrode couple drives and vertical comb drives, and are proved experimentally to be able to actuate mirrors to achieve not only large-range continuous rotation but also 90° rotation. A set of surface-and-bulk-mixed-silicon-micromachining process has been developed to manufacture the new torsion-mirror optical actuators in SOI wafers. In the processing, the comb fingers of about 180 μm in depth are produced. A synthetic coupling-loss model for the coupling system composed of the mirrors and the input and output fiber ends is obtained when the torsion-mirror actuators are brought into use as optical switches or attenuators, etc. for fiber communication applications.
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Wengang Wu, Wengang Wu, Qinghua Chen, Qinghua Chen, Guizhen Yan, Guizhen Yan, Yilong Hao, Yilong Hao, } "Torsion-mirror optical actuators with compound driving structures", Proc. SPIE 5641, MEMS/MOEMS Technologies and Applications II, (30 December 2004); doi: 10.1117/12.576590; https://doi.org/10.1117/12.576590

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