30 December 2004 Two new types of microneedle array fabricated by x-ray lithography
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Abstract
The microneedle for blood extraction and painless injection is a rapidly growing area of interest in bio-applications. Two new types of microneedle array are designed and developed for biomedical application. The one is hollow PMMA microneedle array with very shape tip fabricated by two times X-ray lithography (one time is with X-ray mask and one time is without X-ray mask). The other is PMMA microneedle array with tips and fluid channels fabricated by an X-ray lithography technique. The resist stage of the X-ray system driven by actuators is to realize movement lithography.
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Yigui Li, Susumu Sugiyama, "Two new types of microneedle array fabricated by x-ray lithography", Proc. SPIE 5641, MEMS/MOEMS Technologies and Applications II, (30 December 2004); doi: 10.1117/12.566563; https://doi.org/10.1117/12.566563
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