11 January 2005 Research of the laser cleaning technique based on opto-acoustic effect
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In this paper, the contaminants on the substrate surfaces are cleaned using Q-switched pulse laser irradiation, which with pulse duration typically about 20ns and wavelength typically in the 1064nm or 532nm. A new mechanism for laser cleaning is proposed, which based on opto-acoustic effect that breakdown of the air above the target is obtained by a laser beam, and a laser-induced shock wave is produced to remove the various pollutants on the solid substrate surfaces. This method is much more effective than traditional conservative cleaning techniques including the continuous wave laser cleaning, there are many advantages for this new laser cleaning technology, such as the dry treatment, non-contact, non-damage to the substrate, no environmental pollution, and energy-economic, and so on. We make the theoretical analysis for this physical model of cleaning contaminant in detail and provided some experimental results and photographs.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yuanqing Huang, Yuanqing Huang, Limiao Zhu, Limiao Zhu, Lei Wang, Lei Wang, Jinghua Zeng, Jinghua Zeng, Yuhong Qin, Yuhong Qin, Hui Lin, Hui Lin, Tianlin Hu, Tianlin Hu, Chunhua Chen, Chunhua Chen, "Research of the laser cleaning technique based on opto-acoustic effect", Proc. SPIE 5642, Information Optics and Photonics Technology, (11 January 2005); doi: 10.1117/12.574751; https://doi.org/10.1117/12.574751


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