17 January 2005 An optical switch array with 750-µs switch time
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Abstract
A novel design of micromachining-based high speed 1x2 optical switch array is presented. Employing a triangle-shaped micromachined mirror for beam directing, the design achieved a high level integration of multiple switches on a single substrate, significantly shortened switch time to below 1 ms. An array of four 1x2 switches was fabricated and the performance of the switch array prototype was reported, attaining a fast switch time of less than 750us, extremely low cross-talk <-70dB, an insertion loss of between 0.6 and 0.8 dB, and with an overall size of only 60×36×7 mm3. The experimental result was compared with that from a finite element analysis and a good agreement was obtained.
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Peng Wan, Huiming Yan, Xingkun Wu, "An optical switch array with 750-µs switch time", Proc. SPIE 5644, Optoelectronic Devices and Integration, (17 January 2005); doi: 10.1117/12.581031; https://doi.org/10.1117/12.581031
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