Effect of laser intensity changing on accuracy of size measurement by laser scanning

Tao Jiang; Zhenglin Yu; Guohua Cao; Hongji Xu

doi:10.1117/12.577452

17 January 2005 Effect of laser intensity changing on accuracy of size measurement by laser scanning

Tao Jiang, Zhenglin Yu, Guohua Cao, Hongji Xu

Proceedings Volume 5644, Optoelectronic Devices and Integration; (2005) https://doi.org/10.1117/12.577452
Event: Photonics Asia, 2004, Beijing, China

Abstract

In the system of size measurement by laser scanning, the laser intensity is necessarily kept stability. But in practice, output intensity of laser is continuously attenuated as time passed, so that precision accuracy of detecting system becomes poor. The paper analyzes the effect of laser intensity changing on accuracy of size measurement by laser scanning, provides with the auto-measured circuit and the measuring methods of the output laser intensity, and the method of electrical compensation for intensity change. The method has been applied to the instrument of diameter measurement by laser scanning on line successfully, which is effective and feasible.

Citation Download Citation

Tao Jiang, Zhenglin Yu, Guohua Cao, and Hongji Xu "Effect of laser intensity changing on accuracy of size measurement by laser scanning", Proc. SPIE 5644, Optoelectronic Devices and Integration, (17 January 2005); https://doi.org/10.1117/12.577452

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