Fabrication and characterization of a new type 4×4 arrayed position-sensitive detector

Xunjun Qi; Bin Lin; Dongyan Chen; Yuqing Chen

doi:10.1117/12.568243

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17 January 2005 Fabrication and characterization of a new type 4×4 arrayed position-sensitive detector

Xunjun Qi, Bin Lin, Dongyan Chen, Yuqing Chen

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Proceedings Volume 5644, Optoelectronic Devices and Integration; (2005) https://doi.org/10.1117/12.568243
Event: Photonics Asia, 2004, Beijing, China

Abstract

Position sensitive detectors (PSD) use the lateral photo effect to determine the centroid position of an incident light spot focused on it. A 65-pin ceramic packaged 4×4 arrayed position sensitive detector was fabricated first time as a new prototype of Hartmann-Shack wavefront sensor. The detector, consisting of 16 tetra-lateral sensitive areas, is a p-n-n+ configuration made on 3-inch <111> n-type high resistance crystal silicon substrate. A 100nm antireflection SiO₂ thin film was formed on the surface and a multi-layer cover glass with transmissivity > 98% from 400nm to 950nm. The main parameters of the arrayed as wavefront detector, such as reverse voltage, dark current photosensitivity, response time were reported in the paper.

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Xunjun Qi, Bin Lin, Dongyan Chen, and Yuqing Chen "Fabrication and characterization of a new type 4×4 arrayed position-sensitive detector", Proc. SPIE 5644, Optoelectronic Devices and Integration, (17 January 2005); https://doi.org/10.1117/12.568243

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