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17 January 2005 Micromachining-based fiber-coupled variable optical attenuator
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A design of micromachining based direct-coupled variable optical attenuator (VOA) is presented. The device, fabricated by using CNC engraving and laser spot welding techniques, operates by misaligning a fiber-to-fiber coupling through a lateral displacement of one of the fibers mounted on a micro-machined flexure driven electromagnetically. An FET software package ANSYS was employed to optimize micro-mechanical structure and simulation of the device operation was described in detail. The measured performance of a VOA prototype is reported, featuring a fast dynamic response (<2.3 ms), great dynamic range (0~65dB) and wide bandwidth.
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Huiming Yan, Zhonghui Cao, and Xingkun Wu "Micromachining-based fiber-coupled variable optical attenuator", Proc. SPIE 5644, Optoelectronic Devices and Integration, (17 January 2005);

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