Methodology for a sub-90nm contact layer OPC with DFM flow demonstration

Chi-Yuan Hung; Bin Zhang; Jian Zhang; GuoQiang Xing

doi:10.1117/12.572686

27 January 2005 Methodology for a sub-90nm contact layer OPC with DFM flow demonstration

Chi-Yuan Hung, Bin Zhang, Jian Zhang, GuoQiang Xing

Proceedings Volume 5645, Advanced Microlithography Technologies; (2005) https://doi.org/10.1117/12.572686
Event: Photonics Asia, 2004, Beijing, China

Abstract

Extensive usage of Litho RET, Etch trimming and OPC techniques has become common practice in the integrated patterning flow for 90nm and beyond. In this paper, we will discuss our approach to use OPC for both etch and litho through-pitch bias correction for a 90nm contact layer. In stead of using conventional lumped model, [J.P. Stirniman, M.L. Rieger, SPIE Proc. Optical/Laser Microlithography X, Vol. 3051, p294, 1997], we introduced an alternative modeling approach to reduce our model correction into: Corrected Mask Layout = T_mask^-1 (T_optical^-1 (T_etch^-1 (Design Layout) ) ). Post OPC checking using Synopsys SiVl platform shows that CD 3σ = 7.82nm of through-pitch OPC residual error. This study also shows that integrated patterning flow combined with LRC tools is useful to provide feedback to the designer and highlight some patterning process limitation that is design dependent.

Citation Download Citation

Chi-Yuan Hung, Bin Zhang, Jian Zhang, and GuoQiang Xing "Methodology for a sub-90nm contact layer OPC with DFM flow demonstration", Proc. SPIE 5645, Advanced Microlithography Technologies, (27 January 2005); https://doi.org/10.1117/12.572686

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available