The next generation of RET

Franklin M. Schellenberg

doi:10.1117/12.577222

27 January 2005 The next generation of RET

Franklin M. Schellenberg

Proceedings Volume 5645, Advanced Microlithography Technologies; (2005) https://doi.org/10.1117/12.577222
Event: Photonics Asia, 2004, Beijing, China

Abstract

Resolution Enhancement Techniques (RET) in lithography have enabled optical lithography to reliably produce IC features 2 or even 3 times smaller than the optical wavelength used for imaging. At this point, even the dimensions required for the 32nm node appear to be in reach using 193nm photons, provided hyper-NA lenses and extreme RET solutions are also adopted. In this paper, the development of RET over the past century is briefly reviewed, to better understand how we made it so far using what we have. Current trends for some of the most recent developments in implementing the 65nm IC node are presented. These include novel illumination source optimization algorithms and polarization considerations. This is followed by a general consideration of whether lessons learned from these applications can be applied to other situations currently described as Design for Manufacturing (DFM) technologies. Consideration will also be given to the extension to DFM for other photonic structures, such as photonic crystal switching devices.

Citation Download Citation

Franklin M. Schellenberg "The next generation of RET", Proc. SPIE 5645, Advanced Microlithography Technologies, (27 January 2005); https://doi.org/10.1117/12.577222

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available