Fabrication of high refractive index-modulation structures in fused silica by femtosecond laser pulses

Hengchang Guo; Yan Li; Xi Wang; Ying Fang; Hongbing Jiang; Hong Yang; Qihuang Gong

doi:10.1117/12.576903

28 January 2005 Fabrication of high refractive index-modulation structures in fused silica by femtosecond laser pulses

Hengchang Guo, Yan Li, Xi Wang, Ying Fang, Hongbing Jiang, Hong Yang, Qihuang Gong

Proceedings Volume 5646, Nonlinear Optical Phenomena and Applications; (2005) https://doi.org/10.1117/12.576903
Event: Photonics Asia, 2004, Beijing, China

Abstract

We present the microfabrication of high refractive index-modulated structures written by line scan inside bulk of fused silica with a femtosecond laser at wavelength of 810 nm. The femtosecond laser beam, with duration between 130 fs and 500 fs at a repetition rate of 1 kHz, was focused through a microscope objective with numerical aperture (NA) of 0.10 or 0.25 into the sample. To fabricate high refractive index-modulated structures in fused silica, we investigated the dependence of refractive index change on laser pulse energy, pulse duration, scan speed, and scanning repetitions. The results showed a "triangle region", with pulse duration of 130 fs to 230 fs and pulse energy of 0.35 μJ to 1.5 μJ, for the fabrication of refractive index modulation structures. The refractive index modulation was increased to 3×10^-3 after several scanning passes. Diffractive optical components such as grid, square, circle gratings and Fresnel zone plates have been fabricated by direct writing technique. The structures could be used as diffractive beam splitters, beam shaper and micro-lens.

Citation Download Citation

Hengchang Guo, Yan Li, Xi Wang, Ying Fang, Hongbing Jiang, Hong Yang, and Qihuang Gong "Fabrication of high refractive index-modulation structures in fused silica by femtosecond laser pulses", Proc. SPIE 5646, Nonlinear Optical Phenomena and Applications, (28 January 2005); https://doi.org/10.1117/12.576903

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