21 February 2005 New challenges for VUV-XUV radiation resistant coatings
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Abstract
The paper proposes to review briefly steps of classical experimental progress towards resistant VUV-XUV coatings. It intends to address some of the new challenges of the VUV-XUV radiation resistant coatings, including material investigations, manufacturing, characterizations and active optical components.
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Alexandre Gatto, Alexandre Gatto, Joerg Heber, Joerg Heber, Minghong Yang, Minghong Yang, Nicolas Benoit, Nicolas Benoit, Sergiy A. Yulin, Sergiy A. Yulin, Torsten Feigl, Torsten Feigl, Norbert Kaiser, Norbert Kaiser, } "New challenges for VUV-XUV radiation resistant coatings", Proc. SPIE 5647, Laser-Induced Damage in Optical Materials: 2004, (21 February 2005); doi: 10.1117/12.583583; https://doi.org/10.1117/12.583583
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