16 February 2004 RF MEMS devices for communication systems
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This paper addresses the use of RF MEMS devices in wireless and satellite communication systems. It describes the MEMS actuators typically needed for such devices. Novel configurations are presented for MEMS variable capacitors, MEMS tunable inductors and RF MEMS mutiport switches. The tuning range of the variable capacitor was measured and found to be 280%, which far exceeds that of the traditional parallel plate MEMS variable capacitors. The MEMS tunable inductor is realized using MEMS fixed inductors, capacitors and a variable MEMS capacitor. The proposed MEMS multiport switch has demonstrated a superior RF performance up to 20 GHz.
© (2004) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
R. R. Mansour, D. Yan, M. Bakri-Kassem, M. Daneshmand, Neil Sarker, "RF MEMS devices for communication systems", Proc. SPIE 5648, Smart Materials III, (16 February 2004); doi: 10.1117/12.585325; https://doi.org/10.1117/12.585325

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